PI Instrumente P-561.3 CD

PI Instrumente P-561.3CD mars nanopositioning stage 2111-325/7904D-3 Active Axes XYZ Open Loop Resolution 0.2 nm Max. Normal Load 50 N Travel Range 300 x 300 x 300 µm Closed Loop Linearity 0.03 % Body Material Al Closed Loop Travel Range 100 µm Integrated Feedback Sensor Capacitive Closed Loop Resolution 0.80 nm Push Force Capacity (X) 200 N Push Force Capacity (Y) 200 N Push Force Capacity (Z) 50 N Pull Force Capacity (X) 30 N Pull Force Capacity (Y) 30 N Pull Force Capacity (Z) 30 N Electrical Capacitance (X) 5.2 µF ±20% Electrical Capacitance (Y) 5.2 µF ±20% Electrical Capacitance (Z) 10.4 µF ±20% Dynamic Operating Current Coefficient X (DOCC) 5.2 µA/(Hz x µm) Dynamic Operating Current Coefficient Y (DOCC) 5.2 µA/(Hz x µm) Dynamic Operating Current Coefficient Z (DOCC) 10.4 µA/(Hz x µm) Unloaded Resonant Frequency 190 kHz Unloaded Resonant Frequency (X) 190 Hz Unloaded Resonant Frequency (Y) 190 Hz ±20% Unloaded Resonant Frequency (Z) 380 Hz ±20%